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发明名称
High transmission, high aperture catadioptric projection objective and projection exposure apparatus
摘要
申请公布号
EP2177934(B1)
申请公布日期
2011.09.07
申请号
EP20080018215
申请日期
2008.10.17
申请人
CARL ZEISS SMT GMBH
发明人
KRAEHMER, DANIEL DR.;MUELLER, RALF DR.;SCHICKETANZ, THOMAS;ULRICH, WILHELM;EPPLE, ALEXANDER DR.
分类号
G02B1/11;G03F7/20
主分类号
G02B1/11
代理机构
代理人
主权项
地址
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