发明名称
摘要 PROBLEM TO BE SOLVED: To provide a cutting machine that can surely protect a bellows member as well as preventing cutting scraps from dropping at both sides of the bellows member. SOLUTION: The cutting machine is equipped with a reciprocating chuck table, a cutting means for cutting a processed object held on the chuck table, and a bellows mechanism whose one end is set up on the chuck table and whose other end is set up on a stationary member, wherein the bellows mechanism has a bellows member in which multiple crests and troughs are alternately formed using a sheet material and structured such that they become elastic and multiple protective members that are respectively mounted on the multiple crests of the bellows member and that have a width larger than an interval between contiguous crests when the bellows member is extended, while multiple protective members are composed of a main protective portion formed into a trapezoid and an auxiliary protective portion installed upright on the trapezoid, the lower base portion of the main protective portion is mounted on the crest of the bellows member, and the upper base portion of the main protective portion is overlapped on the top surface of an adjacent main protective portion such that it is slidable. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP4769601(B2) 申请公布日期 2011.09.07
申请号 JP20060066141 申请日期 2006.03.10
申请人 发明人
分类号 H01L21/301;B23Q11/08 主分类号 H01L21/301
代理机构 代理人
主权项
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