| 摘要 |
<p>A method of calibrating a surface measurement instrument 1 comprises: rotating a work piece 14 having an undulating surface on a turntable 16 of a metrological apparatus 2; measuring the surface of the work piece at a plurality of rotational positions; analysing the results of the measurement to determine parameters describing an error causing characteristic of the metrological apparatus; and using the determined parameters to correct measurement data for the error causing characteristic of the metrological apparatus. A rotary encoder 20, 22 is provided for recording the rotary position of the turntable; the encoder provides a signal indicating the angle alphaα. A measurement probe carriage 9 carries a probe 10 carrying a stylus arm 11 having a stylus tip 12 which comes into contact with the surface of the work piece 14 as the measurement probe carriage is moved in the measurement direction. The stylus arm 11 pivots to enable the stylus tip to follow variations in the r direction along a measurement path on the surface of the work piece 14.</p> |
