| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrying hand which secures a good coated surface without the irregularity of dryness and film thickness even if a large- sized substrate is carried right after being coated with a low viscosity coating liquid on its surface, and to provide a substrate carrying method, a color filter manufacturing apparatus using these and a manufacturing method thereof. SOLUTION: This substrate carrying hand attached to an automatic carrying device for carrying a platy substrate while holding it comprises an in-plane support member for supporting the inner surface of the substrate and an in-plane support arm arranged so as to depart more than 10 mm from the surface of the substrate through the in-plane support member. |
