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发明名称
FILM DEPOSITION METHOD
摘要
申请公布号
EP2312616(A4)
申请公布日期
2011.09.07
申请号
EP20090770224
申请日期
2009.06.25
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
HASHIMOTO, SHIN;TANABE, TATSUYA
分类号
H01L21/205;C23C16/02
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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