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发明名称
Interferometer device and method
摘要
申请公布号
EP2060909(B1)
申请公布日期
2011.09.07
申请号
EP20080168889
申请日期
2008.11.12
申请人
CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA - RECHERCHE ET DEVELOPPEMENT
发明人
KOTTLER, CHRISTIAN;KAUFMANN, ROLF
分类号
H05G1/02;G01B9/02;G01B15/02;G01N23/04
主分类号
H05G1/02
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