| 摘要 |
A microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses. The microsystem is achieved in a flat substrate. The oscillating masses are connected to the substrate by suspension springs. The oscillating masses are coupled together by a rigid coupling bar so as to produce an anti-phase movement of the oscillating masses when driven by an excitation device in a predefined excitation direction. The coupling bar is connected to intermediate zones of the corresponding suspension springs. The suspension springs are arranged on opposite sides of the oscillating masses. An intermediate zone is arranged between a first end of a suspension spring, which is fixed to the corresponding oscillating mass, and a second end of the suspension spring, which is fixed to the substrate by a corresponding anchoring point.
|
