发明名称 Method of manufacturing magnetic recording medium
摘要 According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist, etching the second hard mask by using the patterned resist as a mask to transfer the patterns of protrusions and recesses to the second hard mask, etching the first hard mask by using the second hard mask as a mask to transfer the patterns of protrusions and recesses to the first hard mask, removing the second hard mask remaining on the protrusions of the first hard mask, and deactivating the magnetic recording layer exposed in the recesses by means of ion beam irradiation.
申请公布号 US8012361(B2) 申请公布日期 2011.09.06
申请号 US20100705421 申请日期 2010.02.12
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KIMURA KAORI;ISOWAKI YOUSUKE;KAMATA YOSHIYUKI;SAKURAI MASATOSHI
分类号 B44C1/22 主分类号 B44C1/22
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