发明名称 Metal film protection during printhead fabrication with minimum number of MEMS processing steps
摘要 A method of fabricating a printhead having a hydrophobic ink ejection face, the method comprising the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers and a nozzle plate having relatively hydrophilic nozzle surface, the nozzle surface at least partially defining the ink ejection face of the printhead; (b) depositing a hydrophobic polymeric layer onto the nozzle surface; (c) depositing a protective metal film onto at least the polymeric layer; (d) depositing a sacrificial material onto the polymeric layer; (e) patterning the sacrificial material to define a plurality of nozzle opening regions; (f) defining a plurality of nozzle openings through the metal film, the polymeric layer and the nozzle plate; (g) subjecting the printhead to an oxidizing plasma; and (h) removing the protective metal film, thereby providing a printhead having a relatively hydrophobic ink ejection face.
申请公布号 US8012363(B2) 申请公布日期 2011.09.06
申请号 US20070946840 申请日期 2007.11.29
申请人 SILVERBROOK RESEARCH PTY LTD 发明人 MCAVOY GREGORY JOHN;KERR EMMA ROSE;SILVERBROOK KIA
分类号 G01D15/00 主分类号 G01D15/00
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