摘要 |
According to the present invention, a stable operation of an actuator is realized. An actuator 1 according to the present invention includes: a movable section 5; a stationary section 10 for supporting the movable section 5; driving electrode portions 8 and 9 for driving the movable section 5; and a repulsion generation section 6 for generating a repulsion acting between the movable section 5 and the stationary section 10. The repulsion generation section 6 is provided at a position of the stationary section 10 opposing the movable section 5. At least a portion of the repulsion generation section 6 opposes an end of the movable section 5 that is located closer to the movable comb electrodes 9 than to hinges 7. By applying the same driving voltage to the movable section 5 and the repulsion generation section 6, a repulsion is generated. The repulsion acts in a direction of suppressing a rotation of the movable section 5 around an axis which is perpendicular to the planar direction of the movable section 5.
|