摘要 |
This ion detector includes an MCP and a plurality of planar dynodes respectively having a plurality of slits. The plurality of planar dynodes are stacked via spacers parallel to an electron output plane of the MCP, and the first stage planar dynode is opposed parallel to the electron output plane. In accordance with this ion detector, it is possible to obtain output signals having the linearity reaching mV order, and to shorten its pulse width to approximately 600 ps.
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