发明名称 Piezoelectric vibrator having a piezoelectric vibrating strip in a cavity
摘要 There is provided a method of manufacturing a package 1 having a base substrate 10 and a lid substrate 20 bonded to each other and both formed of a glass base material; and a cavity C formed between the both substrates for storing an encapsulated object 2 in a state of being hermetically encapsulated, including: a depression forming step for forming a depression C1 for a cavity which defines the cavity when the both substrates are superimposed to each other on at least one of the both substrates; and a bonding step for superimposing the both substrates so as to store the encapsulated object in the depression and then bonding the both substrates to encapsulate the encapsulated object in the cavity, characterized in that in the depression forming step, printed layers 12 are laminated on an upper surface of a flat plate-shaped glass base material 11 in a frame shape in plan view by screen printing, and then the printed layers and the glass base material are baked at the same time to form the depression.
申请公布号 US8013499(B2) 申请公布日期 2011.09.06
申请号 US20100791286 申请日期 2010.06.01
申请人 SEIKO INSTRUMENTS INC. 发明人 ARATAKE KIYOSHI;KAWADA YASUO
分类号 H01L41/04;H01L41/08 主分类号 H01L41/04
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