发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device in which abrasion and chipping on a cutting edge of an annular blade can be accurately detected without being affected by scattering of cutting water mixed with chips. SOLUTION: The cutting device includes the annular blade 12 having the cutting edge 121 projected from a base 120 to an outer peripheral side, a cutting water supply nozzle 132 for supplying the cutting water to the annular blade 12, and a blade detection means 14 for detecting conditions of the annular blade 12. The blade detection means has a light emitting body and a light receiving body arranged to face each other at a blade entering part where the cutting edge 121 enters. A blade cover 13 has a brush shaped partition member 15 arranged to block the cutting water or the chips from infiltrating into the blade detection means 14 due to high speed rotation of the annular blade 12, wherein the brush shaped partition member 15 divides the cutting water supply nozzle 132 from the blade detection means 14, on an downstream side of the cutting water supply nozzle 132 in a rotating direction A of the annular blade 12 and on an upstream side of the blade detection means 14 in the rotating direction A of the annular blade 12. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011167800(A) 申请公布日期 2011.09.01
申请号 JP20100033386 申请日期 2010.02.18
申请人 DISCO CORP 发明人 YOSHIMURA EIICHI
分类号 B23Q11/08;B23Q11/10;B24B49/12;B24B55/02;H01L21/301 主分类号 B23Q11/08
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