| 摘要 |
PROBLEM TO BE SOLVED: To provide a wire saw device with high reliability achieved in a long service life of a wire and high in processing accuracy. SOLUTION: A Langevin type ultrasonic transducer 13 to which a magnet 20 is bonded by epoxy resin is positioned 1 mm away from a wire 2 having a diameter of approximately 120μm. A supplying device 10 for spraying slurry or a cutting fluid 11 is arranged at a position opposed to the Langevin type ultrasonic transducer 13 with the wire 2 therebetween. The slurry or the cutting fluid 11 sprayed from the supplying device 10 is accumulated on surfaces of the wire 2 and the magnet 20 as indicated by the dotted line. The ultrasonic vibration of the Langevin type ultrasonic transducer 13 is propagated to the magnet 20, and then reliably propagated through the slurry or the cutting fluid 11 to reach the wire 2, thereby ultrasonically vibrating the wire 2. COPYRIGHT: (C)2011,JPO&INPIT |
