FLUID DISPENSING AND DROP-ON-DEMAND DISPENSING FOR NANO-SCALE MANUFACTURING TECHNIQUE

摘要

PROBLEM TO BE SOLVED: To shorten a time needed to fill features of an imprint lithography template. SOLUTION: A method for dispensing a liquid on a substrate includes an arranging step of arranging a pattern of a plurality of spaced-apart droplets such that gas pockets are formed, particularly, between mutually adjacent droplets, namely, a step of forming the pattern so that a plurality of gas pockets are minimum in volume. COPYRIGHT: (C)2011,JPO&INPIT