发明名称 SINGLE CRYSTAL PULLING FURNACE
摘要 <p>A single crystal pulling furnace is disclosed, which comprises a heat shield with a lower part diameter smaller than the upper part diameter. The heat shield surrounding the crystal rod can be provided above the quartz crucible and consists of an insulation material and a reflecting board. The reflecting board can be located inside the insulation material with no space pre-reserved between them and surrounds the crystal rod during crystal pulling. The present invention can improve the effect of cooling crystal rod and increase the crystal pulling speed so as to shorten crystal pulling period and improve the productivity by reflecting the radiation heat from the surface of crystal rod upwardly.</p>
申请公布号 WO2011103740(A1) 申请公布日期 2011.09.01
申请号 WO2010CN76133 申请日期 2010.08.19
申请人 SHANGHAI HANHONG PRECISION MACHINERY CO., LTD.;FUNABASHI, KEI;HE, XIANHAN;KAWANO, TAKAYUKI 发明人 FUNABASHI, KEI;HE, XIANHAN;KAWANO, TAKAYUKI
分类号 C30B29/06;C30B15/00;C30B35/00 主分类号 C30B29/06
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