| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe device which enables high speed test of the electric characteristics of a system LSI in which logic circuits and analog circuits are mixed loaded, at a signal transmission speed of 4 Gbps or above by a low speed tester without investing a high speed tester. SOLUTION: The probe device 1 is loaded with an electric measuring circuit 20 for testing the electric characteristics of a system LSI3a where logic circuits and analog circuits are mixed and loaded. The probe device includes a load board 5 loaded with at least an electric measuring circuits 20 either for logic circuit test or analog circuit test, wherein a plurality of electric measuring circuits 20 are piled up on at least either the upper surface or lower surface of the load board, so that the probe device includes spiral contacts 2 and 12 having a high frequency transmission function of a signal transmission speed of 4 Gbps or above and layerable stack type interconnectors 16, 17, 18. COPYRIGHT: (C)2011,JPO&INPIT
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