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发明名称
METHOD FOR MANUFACTURING POLY CRYSTALLINE SILICON LAYER
摘要
申请公布号
KR20110098552(A)
申请公布日期
2011.09.01
申请号
KR20100018211
申请日期
2010.02.26
申请人
TERASEMICON CORPORATION
发明人
LEE, BYUNG IL;PARK, KYOUNG WAN;JANG, HEE SUP
分类号
H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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