| 摘要 |
<P>PROBLEM TO BE SOLVED: To produce high-purity ultrapure water by removing a TOC (total organic carbon) component including low molecular weight nitrogen compounds in a higher degree. <P>SOLUTION: When organic matter-containing raw water is passed through an organic matter removal catalyst column 4 including a metal, on which hydrogen is adsorbed in the presence of dissolved oxygen, to remove organic matter, the raw water is passed through a H<SB>2</SB>O<SB>2</SB>decomposition catalyst column 1 to remove hydrogen peroxide. The DO (dissolved oxygen) concentration of the hydrogen peroxide-removed raw water is adjusted in a gas dissolution membrane module 2. The organic matter in the raw water having the adjusted DO concentration is decomposed in a low-pressure UV oxidation unit 3. The organic matter-decomposed raw water is passed through the organic matter removal catalyst column 4 and further passed through an ion exchange resin column 5 to perform ion exchange treatment. <P>COPYRIGHT: (C)2011,JPO&INPIT |
