| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a leak test method using a differential pressure type leak test device, which is capable of performing a leak test accurately in a shorter time. <P>SOLUTION: The leak test method using a differential pressure type leak tester 10 includes, between an inspection step of performing inspection using the differential pressure type leak tester 10 and a washing step which is a step preceding the inspection step, an adapting step of adapting the temperature of a work 1, which is a test object, to an atmospheric temperature T<SB>1</SB>of the inspection step so as to make it a temperature T<SB>3</SB>. In the adapting step, air of the atmosphere of the inspection step is blown to the work 1 using fans 15 and 15 so as to adapt the temperature of the work 1 to the atmospheric temperature T<SB>1</SB>of the inspection step to make it the temperature T<SB>3</SB>. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
