| 摘要 |
PROBLEM TO BE SOLVED: To automatically and efficiently clean the inside of a slit of a slit nozzle while suppressing the occurrence of particles. SOLUTION: The slit nozzle cleaning device 70 is constituted of a nozzle cleaning unit 56, an X-direction moving part 54 for moving the whole priming treatment part to a substrate transporting direction (X-direction) and a Y-direction moving part 60 for moving the nozzle cleaning unit 56 to a nozzle longitudinal direction (Y-direction) in a casing. The nozzle cleaning unit 56 is provided with a thin-plate like scraper 74 to be inserted and withdrawn to and from the slit 32a of the slit nozzle 32 from the outside, a holding part 76 holding the scraper 74, a lifting mechanism 78 for moving the scraper 74 integrated with the holding part 76 in the discharge direction of the slit nozzle 32 and a rotating mechanism for rotating the scraper 74. COPYRIGHT: (C)2011,JPO&INPIT
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