LASER BEAM MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To simultaneously form a plurality of scribe lines to be machined, while maintaining a fixed distance with respect to a reference scribe line.

SOLUTION: A laser beam machining apparatus machines a workpiece substrate 60 that is used for a solar cell having a substrate and a thin film arranged thereon. The apparatus includes: a holding part 1 for holding the target substrate 60; a laser oscillator 21 for oscillating a laser beam L; a plurality of optical fibers 25 that guides the laser beam L oscillated from the laser oscillator 21 and that emits the laser beam L from the end face to the outside; and a machining/moving part 35 that moves the holding part 1 and at least one end face of the optical fibers 25 along a machining advancing direction PD. The apparatus is also equipped with a detector which detects positional information for the thin film on the end surface of the optical fibers 25 and a fiber moving part which is connected to at least one of the plurality of optical fibers 25, and on the basis of the information from the detector, moves the end surface of the optical fibers 25 in a direction including a component orthogonal to the machining advancing direction.

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