| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope enhanced in the alignment accuracy of a substrate. SOLUTION: The microscope includes: an image obtaining part for obtaining the image of a visual field area in an observed object; and a focusing part for focusing the image obtaining part on the observed object, by switching and using, according to the object, either one of the phase difference detection of the image from an X-observation position and the phase difference detection of the image from a Y-observation position, which are respectively shifted in two directions orthogonal to each other with respect to the center of the visual field area. The X-observation position and the Y-observation position are arranged outside the visual field area. COPYRIGHT: (C)2011,JPO&INPIT |
