| 摘要 |
PROBLEM TO BE SOLVED: To precisely determine the quality of a soldered state even in the case that irregularity is produced in the soldered shape of a good product by the specification of a land and the specification of a part electrode. SOLUTION: This X-ray inspection method has an X-ray irradiation step for irradiating a substrate 20 with X rays, an X-ray detection step for irradiating the substrate 20 with X rays and detecting the X rays transmitted through the substrate in the X-ray irradiation step, a cross sectional image forming step for forming the horizontal cross-sectional image between the land 22 and solder 40 and the horizontal cross-sectional image of the solder 40 on the basis of the X rays detected in the X-ray detection step, and a determining step for determining the soldered state on the basis of the contrast difference between the horizontal cross-sectional image between the land 20 and the solder 40 and the horizontal cross-sectional image of the solder 40 formed in the cross-sectional image forming step. COPYRIGHT: (C)2011,JPO&INPIT
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