发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 A method for fabricating a semiconductor device includes forming junction area for a bit line contact (BLC) and a junction area for a storage node contact (SNC) by performing ion implantation in a substrate having a buried gate; forming a first insulation pattern having an opening to expose the junction areas; forming a buffer layer to fill the openings; forming a second insulation pattern over the first insulation pattern after filling the openings, wherein the second insulation pattern has openings to expose the buffer layer in an area of the buffer layer that lies over the junction area for the SNC; and forming an SNC to fill the opening of the second insulation patterns.
申请公布号 US2011212607(A1) 申请公布日期 2011.09.01
申请号 US20100939453 申请日期 2010.11.04
申请人 KIM BAEK-MANN 发明人 KIM BAEK-MANN
分类号 H01L21/265 主分类号 H01L21/265
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