发明名称 |
SUBSTRATE COOLING APPARATUS AND SUBSTRATE PROCESSING SYSTEM |
摘要 |
A substrate cooling device configured to cool a substrate after a treatment, the device includes: a housing having a space configured to house a substrate internally; a pair of holder sections provided so as to face an inner wall of the housing, and including a groove section supporting an end neighborhood of the substrate; and a pair of cooling sections including a cooling mechanism provided to sandwich the pair of holder sections in a direction crossing a direction in which the holder sections face each other. According to the invention, a time for cooling the substrate after the treatment can be reduced. |
申请公布号 |
KR20110098806(A) |
申请公布日期 |
2011.09.01 |
申请号 |
KR20117015901 |
申请日期 |
2009.12.02 |
申请人 |
SHIBAURA MECHATRONICS CORPORATION |
发明人 |
IHARA RYUTA;NITTA HIDEYUKI;KAWAGOE YOSHINORI |
分类号 |
H01L21/683;H01L21/02;H01L21/027;H01L21/205 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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