| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric ceramics film where the piezoelectric ceramics film of desired characteristics is easily manufactured, a piezoelectric element, a liquid injection head, a liquid injection apparatus, and a composition for forming the piezoelectric ceramics film. <P>SOLUTION: The method of manufacturing the piezoelectric ceramics film includes a step of forming a piezoelectric ceramics precursor film by the composition for forming the piezoelectric ceramics film with a complex containing Zr, Ti, Pb and a solvent where each ligand of Zr, Ti and Pb comprising the complex is of the same type and in addition it is the same as that of the solvent and a step of heating the piezoelectric ceramic precursor film so that the same is crystallized. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
