| 发明名称 |
CONTACTOR, TEST DEVICE FOR SEMICONDUCTOR APPARATUS, AND METHOD FOR MANUFACTURING SEMICONDUCTOR APPARATUS |
| 摘要 |
A contactor includes a contactor base material including a first material and a conductor film including a second material. The conductor film is formed only on a contact surface with an electrode of a semiconductor apparatus at a tip of the contactor film.
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| 申请公布号 |
US2011212551(A1) |
申请公布日期 |
2011.09.01 |
| 申请号 |
US201113033796 |
申请日期 |
2011.02.24 |
| 申请人 |
FUJITSU SEMICONDUCTOR LIMITED |
发明人 |
MARUYAMA SHIGEYUKI;SEKIZAWA YOSHIHIRO;SUZUKA TOMOHIRO |
| 分类号 |
H01L21/66;G01R31/20 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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