METHOD FOR CONTROLLING SYNCHRONIZATION WHEN APPLYING DC POWER OF PULSE PLASMA,申请号WO2011KR01400-传众专利搜索

发明名称	METHOD FOR CONTROLLING SYNCHRONIZATION WHEN APPLYING DC POWER OF PULSE PLASMA
摘要	Disclosed is a method for controlling synchronization when applying DC power of pulse plasma. The method for controlling synchronization when applying DC power of pulse plasma according to the present invention involves applying DC power in accordance with the on/off periods of RF pulse power, such that minus (-) power periods and plus (+) power periods can be adjusted, thereby generating plasma suitable for each process and achieving maximized process efficiency.
申请公布号	WO2011105873(A2)	申请公布日期	2011.09.01
申请号	WO2011KR01400	申请日期	2011.02.28
申请人	SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION;YEOM, GEUN YOUNG;KANG, SE KOO;JEON, MIN HWAN;PARK, JONG YUN;PARK, BYOUNG JAE;YEON, JE KWAN	发明人	YEOM, GEUN YOUNG;KANG, SE KOO;JEON, MIN HWAN;PARK, JONG YUN;PARK, BYOUNG JAE;YEON, JE KWAN
分类号	H01L21/3065;H01L21/8247;H01L27/115	主分类号	H01L21/3065
代理机构		代理人
主权项
地址