| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating processing method, capable of reducing an amount of coating liquid required for covering a whole surface of a substrate with the coating liquid, when various types of coating liquids are applied to the whole faces of the substrate. SOLUTION: In the coating processing method, the coating liquid is applied to the surface of the substrate by supplying the coating liquid to the surface of the rotating substrate and spreading the supplied coating liquid to an outer peripheral side of the substrate. The method includes a supply process S17 for supplying the coating liquid to the surface of the substrate while a supply position where the coating liquid is supplied to the surface of the rotating substrate is moved to the outer peripheral side with movement of the coating liquid spread to the outer peripheral side. COPYRIGHT: (C)2011,JPO&INPIT
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