| 摘要 |
PROBLEM TO BE SOLVED: To perform calibration of an image measurement machine more simply. SOLUTION: A standard scale 51 is a calibrator used for calibration of the image measurement machine which measures the distance between sections of an object to be inspected based on an observation image obtained by imaging the object. The standard scale 51 includes a scale 101 showing the length from the starting point and a code 102 containing an instrumental error for providing a true value of the scale 101. At the time of the calibration of the image measurement machine, reading and decoding of the code 102 are performed by the image measurement machine, thereby the instrumental error is obtained and the true value of the scale 101 is calculated. Distance measurement is performed for each scale 101 by the image measurement machine and a measurement error of the image measurement machine is determined from the measurement results and the true value obtained by the code 102. The code 102 for providing the true value of the scale 101 is formed in the standard scale 51, thereby the calibration can be simply performed. The present invention can be applied to an observation system. COPYRIGHT: (C)2011,JPO&INPIT
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