| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflective film laminate constructed by using an Ag film, having a high initial reflectivity, and including a protection film having superior sulfuration resistance, heat resistance, and an extremely small number of pin holes, for hardly causing reduction in the reflectivity due to aggregation of Ag atoms of the Ag film. <P>SOLUTION: The reflective film laminate has a pure Ag film or an Ag-based alloy film as a first layer on a substrate, and on the first layer, an oxide film of one or more metals selected from the group consisting of Zr, Cr, Nb, Hf, Ta, V, Ni, Mo, W, Al and Si as a second layer. The thickness of the second layer is 0.1-10 nm, and deterioration of the reflectivity of the reflective film laminate due to formation of the second layer is ≤30%. <P>COPYRIGHT: (C)2011,JPO&INPIT |
