| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To scan illuminating light two-dimensionally without changing the capability of focusing illuminating light on a specimen. <P>SOLUTION: The microscope apparatus 1 includes: a spatial light modulator 13 modulating the wavefront of illuminating light from a light source 2; a scanner 6 having two mirrors independently pivoted about two non-parallel axes; a relay optical system 5 guiding the illuminating light, whose traveling direction has been changed by the scanner, to an objective optical system; and a modulation region adjusting unit 9 that moves a wavefront modulation region on the spatial light modulator 13 in which an image is formed, in response to pivoting of the mirrors of the scanner 6. The modulation region adjusting unit 9 moves the modulation region so that the image of the pupil position of the object optical system 8 assuming that the mirror of the scanner 6 is stopped, moves in the direction opposite to the direction of moving the image relayed to the pupil position of the objective optical system 8 assuming that the mirrors of the scanner 6 pivot while the image on the spatial light modulator 13 is fixed. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
