| 摘要 |
PROBLEM TO BE SOLVED: To solve the following problem: there is no example to utilize single crystal diamond for a nano/micromachine (N/MEMS (Nano/Microelectromechanical system)) device, and it is because the growth of single crystal diamond on an oxide being a sacrifice layer is difficult, then a cantilever or the like are produced by producing polycrystal or nanodiamond on a sacrifice layer oxide in the conventional technique, however, mechanical performance, vibration properties, stability and reproducibility have been insufficient. SOLUTION: In this invention, utilizing a phenomenon in which a high concentration ion implantation region in a diamond substrate 101 is reformed into graphite, the reformed graphite layer 104 is electrochemically etched away as a sacrificial layer, and a diamond layer left behind thereon is used as a movable structure. The produced cantilever 106 shows resonance vibration of high frequency. By using the single crystal diamond, the mechanical performance, stability and electrical properties of an N/MEMS device can be improved. COPYRIGHT: (C)2011,JPO&INPIT |
