METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, AND PIEZOELECTRIC VIBRATOR

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrator which performs frequency adjustment easily and precisely during manufacture, and can obtain a stabilized oscillation frequency by preventing frequency variations and fluctuations even after manufacturing the piezoelectric vibrator.

SOLUTION: The method of manufacturing a piezoelectric vibrator where the oscillation frequency F is adjusted to a predetermined target frequency f0 by providing a frequency adjustment region in vibration arms 23 and 24 having excitation electrodes 29 and 30 formed therein includes a rough adjustment step A for adjusting the oscillation frequency F roughly by irradiating a first metal film 31 with a laser beam after it is formed in the frequency adjustment region, and a fine adjustment step B for adjusting the oscillation frequency F finely toward the target frequency f0 by irradiating a second metal film 33 with an ion beam after it is formed on the surface of the first metal film 31 subjected to rough adjustment.

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