HYDROGEN CONTENT RATIO ACQUIRING APPARATUS AND HYDROGEN CONTENT RATIO ACQUIRING METHOD

摘要

Disclosed is a hydrogen content ratio acquiring apparatus (1), wherein the values of a predetermined parameter group and reference information, which relates the content ratio of SiH contained in a silicon film to the content ratio of SiH2 contained in the silicon film, are previously generated and stored. A measured spectrum of the silicon film on a glass substrate (9) is obtained by measuring the silicon film by means of a spectroscopic ellipsometer (3), and on the basis of the measured spectrum, the values of the parameter group are obtained using a computer (6). Then, on the basis of the parameter group values and the reference information, the value of the SiH content ratio and that of the SiH2 content ratio are accurately obtained.