发明名称 GATE VALVE
摘要 The present invention relates to a gate valve mounted to an exhaust line of vacuum equipment. The valve forms a portion of the exhaust line. The gate valve is moved horizontally so that it is possible to completely block processing contaminants and by-products from being introduced into the gate valve. Furthermore, the exhaust effect of the gate valve is excellent.
申请公布号 WO2011105737(A2) 申请公布日期 2011.09.01
申请号 WO2011KR01167 申请日期 2011.02.23
申请人 LAONTECH, CO,. LTD.;JOH, GIL YOUNG;CHOI, HAN GI 发明人 JOH, GIL YOUNG;CHOI, HAN GI
分类号 F16K51/02;F16K27/04;F16K49/00;H01L21/02 主分类号 F16K51/02
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