| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection method and surface inspection device capable of improving the accuracy for detecting a defect such as unevenness existing in a surface of an inspecting object without complicating the inspection process and the constitution of the inspection device. SOLUTION: This surface inspection device includes a line lighting system 6 for emitting illumination light 7 to the surface 8 of the inspecting object 2, a CCD camera 14 for receiving regular reflection light 12 from the surface 8 of the inspecting object 2 of the illumination light 7, a light shielding section 18 that is arranged between the inspecting object 2 and CCD camera 14 and shields a part of the regular reflection light 12 entering the CCD camera 14, and an image processing section 25 for determining the existence of unevenness in the surface 8 of the inspecting object 2 based on the luminance information obtained from light 32 located in a periphery, of the regular reflection light 12 received by the CCD camera 14. COPYRIGHT: (C)2011,JPO&INPIT |
