| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing apparatus of a web that can remove minute dust stuck to the surface of a web and that can prevent washing liquid from scattering. SOLUTION: In the washing apparatus 60, a nozzle 36 capable of removing minute dust stuck to the surface of a web is arranged inside a water tank 62 in a manner immersed in a liquid 64 stored in the water tank 62. The liquid 64 has a larger specific gravity and a higher viscosity compared with gas. Consequently, by arranging the nozzle 36 immersed in the liquid 64, a washing liquid discharged from the inlet and the outlet 53b of the nozzle 36 has the kinetic energy diffused by the liquid 64. As a result, according to the washing apparatus 60, the washing liquid is prevented from scattering from the inlet and the outlet 53b of the nozzle 36. COPYRIGHT: (C)2011,JPO&INPIT
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