发明名称 MANUFACTURING METHOD FOR MAGNETIC RECORDING MEDIUM
摘要 A magnetic recording medium having a high magnetic pattern contrast is manufactured. By changing an acceleration voltage that accelerates ions in a process gas, depths (peak depths D0 and D1) from a magnetic layer 44, at which an injection amount of a target element is the maximum, can be made with set depths even if a film thickness of an ion permeation portion 48, which is a thin film portion of a resist 49, decreases. Since the set depths are achieved for the peak depths D0 and D1, a portion to be processed 43 of the magnetic film 44 is made non-magnetized from a top surface to a bottom surface, and a magnetic portion is separated; thus, the magnetic recording medium with a high magnetic pattern contrast can be obtained.
申请公布号 US2011212272(A1) 申请公布日期 2011.09.01
申请号 US201113049250 申请日期 2011.03.16
申请人 ULVAC, INC. 发明人 NISHIHASHI TSUTOMU;WATANABE KAZUHIRO;MORITA TADASHI;SATO KENJI;TANAKA TSUTOMU;UZUMAKI TAKUYA
分类号 C23C14/04 主分类号 C23C14/04
代理机构 代理人
主权项
地址