| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an adjusting method, adjusting an angle made between the respective reflecting surfaces of two mirrors with high accuracy. <P>SOLUTION: The adjusting method, which adjusts an angle made between the reflecting surface of a first mirror and the reflecting surface of a second mirror, includes: a step of adjusting an angle made between the first reference surface and the second reference surface so that the angle made between the first reference surface and the second reference surface is a target angle; a step of disposing a first reference mirror and a second reference mirror parallel to each other; a step of fixing first and second auto-collimators to a base member; a step of adjusting the mirrors held by a holding member for holding the first mirror and the second mirror using the auto-collimators so that the angle made between the reflecting surface of the first mirror and the reflecting surface of the second mirror is the target angle. <P>COPYRIGHT: (C)2011,JPO&INPIT |
