| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact ozone detection sensor for precisely detecting ozone concentration. <P>SOLUTION: The ozone detection sensor includes: a measurement cell 4 for inserting fluid O containing ozone into a pair of opposed clearances 5 of light-transmitting substrates 4a, 4b; a light source 20 for applying ultraviolet light UV to one substrate 4a; a thin film 10 of a P-type or N-type zinc oxide (ZnO) with a prescribed thickness d where sensitivity of ultraviolet light is increased by doping or intrinsic defects provided at a translucent side of the other substrate 4b; a pair of electrodes 11, 12 for applying a fixed voltage to the thin film 10; and a measurement circuit 16 for detecting current between the pair of electrodes 11, 12. The prescribed thickness d of the zinc oxide thin film 10 is selected so that a sensitivity ratio (UVC/UVA) of C-region ultraviolet light to A-region ultraviolet light becomes not less than a prescribed ratio. Preferably, the prescribed film thickness d of the zinc oxide thin film 10 is selected so that the sensitivity ratio (UVC/UVA) of the C-region ultraviolet light to the A-region ultraviolet light is maximized within a range where the time constant of current between the pair of electrodes 11, 12 is not more than a prescribed value. <P>COPYRIGHT: (C)2011,JPO&INPIT |
