发明名称 VERIFICATION PROGRAM, VERIFICATION METHOD AND VERIFICATION APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To increase the accuracy of simulation by reproducing an effect of a depletion layer formed immediately beneath an intermediate node. <P>SOLUTION: A verification apparatus detects, from an equivalent circuit 400 as an NMOS circuit model, a parallel circuit comprising a junction resistance RJLG<SB>S</SB>and a junction capacitance CJG<SB>S</SB>, and a junction resistance RJLG<SB>D</SB>and a junction capacitance CJG<SB>D</SB>, and a connection resistance Rdep connecting the parallel circuit to a substrate electrode. The verification apparatus then calculates a first coefficient indicating an impact of the junction resistances RJLG<SB>S</SB>and RJLG<SB>D</SB>and connection resistance Rdep on amplitude variation, and calculates a second coefficient indicating an impact of the junction capacitances CJG<SB>S</SB>and CJG<SB>D</SB>and connection resistance Rdep on phase variation. A junction capacitance CJG (=CJG<SB>S</SB>=CJG<SB>D</SB>) is corrected with the sum of the first and second coefficients. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011170569(A) 申请公布日期 2011.09.01
申请号 JP20100033014 申请日期 2010.02.17
申请人 FUJITSU SEMICONDUCTOR LTD 发明人 MIYAOKA HIROKI;YAMAGUCHI SEIICHIRO;SAKATA TAKESHI
分类号 G06F17/50;H01L21/82 主分类号 G06F17/50
代理机构 代理人
主权项
地址