SURFACE SHAPE RECOGNITION SENSOR AND METHOD OF PRODUCING THE SAME

摘要

The sensor has an upper electrode (110b) provided above lower electrodes (105a), which are arranged on a substrate (101), through a support (107a). A structure (113b) comprised of canopy and support portion for supporting the canopy, is provided on the upper electrode. The area of upper electrode is smaller than area of canopy. An independent claim is also included for manufacturing method of surface shape recognition sensor.