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发明名称
AN APPARATUS OF FORMING METAL NITRIDE LAYER FOR LIGHT EMITTING DIODE
摘要
申请公布号
KR20110097502(A)
申请公布日期
2011.08.31
申请号
KR20100017372
申请日期
2010.02.25
申请人
TG SOLAR CORPORATION
发明人
LEE, SI WOO;LEE, YOO JIN;KIM, DONG JEE
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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