The converter has a membrane structure comprising a piezo layer with a piezoelectric material arranged on a carrier layer i.e. silicon layer, so that vibrations of the membrane structure are generated by applying voltage to the piezo layer. The structure is divided into segments (9a, 9b) in a surface of the structure by cutting lines (7) so that a membrane is mechanically coupled to the cutting lines that cut through all layers of the structure. One of the cutting lines structures the structure into a spiral segment that runs around a middle point of the structure. An independent claim is also included for a method for manufacturing a sound converter.
申请公布号
EP2362686(A2)
申请公布日期
2011.08.31
申请号
EP20110001587
申请日期
2011.02.25
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG
发明人
KALTENBACHER, DOMINIK;SCHAEFER, ARMIN;SCHAECHTELE, JONATHAN;ZENNER, HANS-PETER;GOLL, ERICH DR.;DALHOFF, ERNST;MURALT, PAUL;CONDE, JANINE