发明名称 |
HIGH REPETITION RATE EXCIMER LASER SYSTEM |
摘要 |
The invention relates to an High Repetition Rate UV Excimer Laser which includes a source of a laser beam and one or more windows which include magnesium fluoride. Another aspect of the invention relates to an excimer laser which includes a source of a laser beam, one or more windows which include magnesium fluoride and a source for annealing the one or more windows. Another aspect of the invention relates to a method of producing a predetermined narrow width laser beam. |
申请公布号 |
EP1371117(B1) |
申请公布日期 |
2011.08.31 |
申请号 |
EP20020728380 |
申请日期 |
2002.03.01 |
申请人 |
CORNING INCORPORATED |
发明人 |
PELL, MICHAEL A;SMITH, CHARLENE M;THEN, PAUL M;SPARROW, ROBERT W |
分类号 |
C30B29/12;H01S3/08;C30B11/00;H01S3/02;H01S3/034;H01S3/1055;H01S3/106;H01S3/225 |
主分类号 |
C30B29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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