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发明名称
摘要
申请公布号
JP4763555(B2)
申请公布日期
2011.08.31
申请号
JP20060233443
申请日期
2006.08.30
申请人
发明人
分类号
H01L29/78;H01L21/336
主分类号
H01L29/78
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