| 摘要 |
The projection optical system uses a plurality of wavelengths or a wavelength band within a wavelength range from a visible region to a near ultraviolet region. The double-telecentric projection optical system includes: a first lens group with a positive power; a second lens group with a negative power, including a predetermined lens or lenses; and a third lens group with a positive power, including a stop and at least two positive lenses satisfying a predetermined condition relating to refractive index. The projection optical system satisfies a predetermined condition relating to a composite focal length of the first lens group and the second lens group, and a focal length of the third lens group.
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