发明名称 |
Crystallization apparatus, crystallization method, device, and light modulation element |
摘要 |
A crystallization apparatus includes a light modulation element, and an image forming optical system that forms a light intensity distribution set based on light transmitted through the light modulation element on an irradiation surface. The crystallization apparatus irradiates a non-single crystal semiconductor film with light having the light intensity distribution to generate a crystallized semiconductor film. A curvature radius of at least one isointensity line of a light intensity substantially varies along the isointensity line in the light intensity distribution on the irradiation surface, and a curvature radius of at least a part of the isointensity line has a minimum value of 0.3 μm or below.
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申请公布号 |
US8009345(B2) |
申请公布日期 |
2011.08.30 |
申请号 |
US20100962750 |
申请日期 |
2010.12.08 |
申请人 |
ADVANCED LCD TECHNOLOGIES DEVELOPMENT CENTER CO.,LTD. |
发明人 |
TANIGUCHI YUKIO;MATSUMURA MASAKIYO;AZUMA KAZUFUMI;KATO TOMOYA;ENDO TAKAHIKO |
分类号 |
G02F1/01 |
主分类号 |
G02F1/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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